Course Index

Introduction to atomic and continuum scale mechanical matrices and associated tensor representations, generalized Hooke's Law, stress deformation and flow. Applications to nanomechanics of nanoscale systems and mechanics of nanoscale assemblies. Introductory fracture mechanics and dislocation mediated deformation mechanisms of nanoscale solids, including introductions to creep, and fatigue for nanoscale structures.

NNSE 502 Mathematical Methods for Non-Biological Nanosciences (3)

Mathematical methods, both numerical and analytical, with primary focus on and application to atomic and nanometer scale theoretical and experimental phenomena. Formal treatments will include both modified classical and modern mathematical techniques, with primary emphasis on emerging fundamental treatments of nanoscale phenomena. Modified classical techniques to be covered include Fourier and transform analysis, orthogonal functions and Hilbert space, special functions, Green's functions and integral equations. A brief survey of modern methods for nanoscale electronic structure based on the Density Functional Theory will be given. Numerical techniques, the major focus of the course, will be explored using FEMLAB (access will be provided), a flexible user-programmable framework for doing Finite Element calculations in MATLAB.

NNSE 503 (HBMS 505) Biological Basis of Public Health (3)

Introduction to field of biomedical sciences and public health, including infectious and transmissible vectors, genetic disease and chronic disorders. Explanation of laboratory based procedures for detection, monitoring, and treating such diseases. Concepts of basic, relevant laboratory methods and data interpretation introduced. Discussion of impacts of nanotechnology on biomedical sciences, medicine and public health. Prerequisite: College level biology or biochemistry or genetics or molecular biology or permission of instructor.

NNSE 504 Chemical Principles of Nanotechnology (1)

This course introduces the chemical principles behind nanoscale phenomena critical to nanomaterials, nanoengineering, nanoscience and nanobiology. Fundamental chemical principles are taught using concrete examples relevant to nanotechnology and nanotechnological applications. Topics covered include the chemical structure of nanomaterials, energetics and kinetics, reactivity, catalysis, and characterization. Prerequisites: Open to graduate students in the CNSE or Departments of Physics, Mathematics, Engineering, Computer Science or Biology, and with permission of instructor. No prior chemistry course required.

NNSE 505 Crystallinity and Structure of Nanomaterials (3)

Emerging nanoscale x-ray, electron and neutron diffraction techniques critical to the study of nanomaterials and nanomaterial systems will be described. Examples of application areas will include nanocrystalline materials, nanocomposities, quantum well structures, extreme ultraviolet (EUV) optical elements and grain size determination in nanomaterials and nanometer scale systems. Since single techniques will often be insufficient to obtain needed information additional complementary techniques such as atomic force microscopy (AFM) and scanning tunneling microscopy (STM) will be described as needed. Laboratory experiments and demonstrations will be a key part of the course activities.

NNSE 506 Foundations of Nanotechnology I

Crystallography and Diffraction for Nanomaterial Systems (1 Cr)
Fundamental descriptions of crystalline structure and experimental determination for nanomaterial systems.

Phase Equilibria for Nanoscale Systems (1 Cr)
First, second, and third laws of thermodynamics as applied to nanoscale systems; activity and the equilibrium constant; solutions; phase relations (including the phase rule); heterogeneous equilibria; free-energy-composition diagrams and their relation to phase transitions; phase diagrams.

Nanoscale Kinetics and Transport (1 Cr)
Discussion of time-dependent mass transport in nanomaterials system through a formal treatment of diffusion theory.

Practical Solid State Quantum Theory (1 Cr)
Practical descriptions of how physical properties and behaviors of materials become dominated by quantum effects as length scales approach atomic dimensions.

Nanoscale Mechanics of Materials (1 Cr)
Introduction to atomic and continuum scale mechanics appropriate to nanoscale systems and assemblies, including the role of defects.

NNSE 507 Foundations of Nanotechnology II

Mathematical Methods in Nanoscale Research (1 Cr)
Introduction to the critical mathematical tools needed for research and education in nanotechnology.

Practical Modeling for Nanoscale Systems (1 Cr)
Principles of modeling structures and processes at the nanometer scale, including meshing techniques, finite element analysis, and molecular dynamics.

Solid State Quantum Theory IA (1 Cr)
Introduction to the quantum theory of nanoscale material systems and devices.

Molecular Materials (1 Cr)
Structure, chemistry, thermodynamics and physical properties of long chain molecules and molecular structures, including polymers, electronic polymers, proteins, carbon nanotubes and fullerenes, for applications in nanoscale systems, architectures, and devices.

Science of Nanoscale Laboratory Techniques (1 Cr)
Overview of the scientific basis of key technologies in experimental nanotechnology research, including laboratory safety.

NNSE 508 Foundations of Nanotechnology III

Particle-Solid Interactions in Nanomaterials (1 Cr)
Interaction of high energy photons, electrons, and ions with matter in the context of atomic scale characterization of nanoscale materials, systems, and devices.

Nanoscale Analytic Techniques (1 Cr)
Physical basis of the major analytical methods used for nanoscale materials analysis.

Nanoscale Electronic and Magnetic Properties (1 Cr)
Description and atomic scale origins of the electronic and magnetic properties of nanoscale materials, structures, and devices.

Optical/Photonic Properties of Nanostructures (1 Cr)
The interaction between electromagnetic waves and nanoscale materials, structures, and devices (molecular systems, thin film systems, etc...) is treated with particular attention to the increasing role of quantum effects as length scales approach atomic dimensions.

Solid State Quantum Theory IB (1 Cr)
Quantum origins of physical properties in nanoscale systems.

NNSE 509 Foundations of Nanotechnology IV

Deposition Techniques for Ultra-Thin Films (1 Cr)
Overview of deposition and processing methodologies used in ultra-thin film growth and related nanomaterial syntheses.

Nanoscale Device Principles (1 Cr)
The physical principles underlying the design and operation of modern electronic and optoelectronic nanoscale devices and associated device architectures.

Noncrystalline and Soft Nanomaterials (1 Cr)
Introduction to the amorphous state of nanomaterials, including the structure of liquids and glassy nanoscale solids. Introduction to "soft" nanoscale materials including biological films, membranes and membrane polymers, liquid crystals and colloids.

Introduction to NEMS/MEMS (1 Cr)
Design fundamentals of nanometer scale electro-mechanical systems.

Nanoscale Surfaces and Interfaces (1 Cr)
Introduction to surface structure, properties, thermodynamics and analysis and their role in nanotechnology.

NNSE 511 Quantum Theory of Solids I (3)

Introduction to the quantum theory of nanoscale material systems. Fundamental concepts, quantum dynamics, symmetry in infinite and nanoscale systems. Approximation methods and scattering theory in infinite and finite nanometer size systems. Introduction to energy band structure for periodic and nanoscale crystals. Introductory application of plane wave and tight-binding approaches for band structure of nanoscale systems. Practical applications to nanoscale materials.

NNSE 512 Quantum Theory of Solids II (3)

Applications of the quantum theory of nanoscale solid-state material systems. Fundamentals of free-electron gas in nanoscale systems and Hartree theory. Fundamentals of phonons in nanoscale systems and phonon-electron coupling. Applications to band structure of ultra-small systems (2D, finite size). Development of Fermi surfaces in metals and nanoscale metallics. Quasi-particles in bulk and nanoscale systems: Plasmons, polaritons, polarons, excitons (and associated optical processes). Prerequisite: NNSE 507 'Solid State Quantum Theory IA' or equivalent.

NNSE 513 Microeconomic Foundations of Nanoeconomics (3)

This course will provide students with foundations of microeconomic theory and techniques taught in a graduate-level microeconomics course as applied to and adapted for the field of nanoeconomics. The material will be supplemented with nanotechnology-focused readings. Students will study examples, articles and case studies from the more specific field of industrial innovation specifically tailored for nano-centric concepts and practices. Particular focus will be paid to nanotechnology intensive industries such as nanoelectronics and nanobiotechnology (pharmaceuticals, nanomedicine, etc.). By the end of the course, students will understand the microeconomic principles as applied and adapted to the creation, diffusion, and adoption of innovation and nanotechnology. Prerequisites: Open to MA and PhD students enrolled in the CNSE and others by permission of the instructor.

NNSE 514 Macroeconomic Foundations of Nanoeconomics (3)

This course will provide students with foundations of macroeconomic theory and techniques taught in a graduate-level macroeconomics course as applied to and adapted for the field of nanoeconomics. Topics covered include the impact of nano-innovation on productivity, employment, investment, and trade. The material will be supplemented with nanotechnology focused readings. Particular attention will be paid to the analysis of the impact of nanotechnology on the macroeconomy. By the end of the course, students will understand the macroeconomic principles behind the creation, diffusion, and adoption of innovation and nanotechnology. Prerequisites: Open to MA and PhD students enrolled in the CNSE and others by permission of the instructor.

NNSE 516 Physical Kinetics for Nanoscale Systems and Nanoscale Systems Processing (3)

Thermodynamics of Phase equilibrium, kinetics of gases, general diffusion theory, homogeneous and heterogeneous nucleation phenomena, and phase diagrams relevant to nanoscale systems and nanoscale materials formation. Theoretical and experimental aspects of first and second order phase transformations in nanoscale systems including correlation length truncation. Nanoscale grain nucleation, film growth and phase transformations in nanoscale systems.

NNSE 517 Science and Nanoengineering of Semiconductor Materials and Nanostructures (3)

Physical properties of nanostructured semiconductors critical to nanoscale optoelectronic devices. Bandgap engineering of nanostructures, two-, one- and zero-dimensional systems, transport in nanoscale superlattices and quantum wells. Carrier diffusion and scattering, ballistic transport, optical absorption, excitonic effects, radiative and non-radiative recombination, optical scattering in nanostructured semiconductors. Prerequisite: NNSE 511.

NNSE 518 Nanoelectronic Devices, Circuits, and Systems (3)

The objective of this course is to provide the students with the knowledge of designing emerging nanoelectronic devices and using these devices to build future computing systems. After an introduction to CMOS devices and circuits, the course will cover CMOS design and simulation topics. Then, emerging nanoscale components that are beyond CMOS devices will be introduced, including: carbon nanotube based devices, quantum dots and molecular devices. More attention will be paid to the applications of these devices in implementation of future computers. The memory and logic architectures that take advantage of the properties of the emerging devices will be discussed. The recently developed CMOS-nano hybrid computing system will also be reviewed. Prerequisites: NNSE 509 Nanoscale Device Principles, NNSE 616 Nanoscale Semiconductor Devices or permission of the instructor.

NNSE 519 Principles of Materials Nanoengineering (3)

This course will explore the fundamental structure/chemistry/property relationships in nanomaterials and nanomaterial systems. Examples of basic concepts will be drawn from areas that include nanoelectronics, nanophotonic devices, superconducting systems and nanoelectromechanical devices. In order to achieve this objective students will have to understand key elements of thermodynamics, nanophase diagrams, band theory and crystallography as well as the fundamentals of mechanical, electrical and magnetic properties of nanomaterials.

NNSE 520 Nanobiology (3)

This course will seek to introduce basic concepts in nanobiology at the graduate level. This course will initially focus on fundamental biological principles such as DNA/RNA synthesis and replication, protein synthesis, and cellular structure and function. After developing these basic concepts, the course will then focus on major topical areas in nanobiology. These topics will include biosensors, nanomedicine, biomimetics, bioinformatics, and applied nanobiological methods. Students will be expected to read current nanobiology publications and then participate in in-class discussions. In addition to quizzes and a midterm exam, students will also be evaluated based upon in-class participation and completion of a written final project. Prerequisites: Open to graduate students in CNSE; other UAlbany students in Departments of Biology, Physics, Chemistry, Computer Science, or Mathematics, with permission of instructor.

NNSE 525 Experimental Methodologies for Non-Biological Nanosciences (3)

Statistical principles for design-of-experiment methods as applied to nanomaterials self-assembly, processing, and associated development of analytical protocols. Elementary ideas of blocking, general principles of linear model analysis. Introduction to replication, covariance, experimental treatment structures, and full- and partial-factorial designs.

NNSE 528 Nanosystems Science and Technology (3)

Fundamentals of nanosystems design including nanoelectrical mechanical systems (NEMS), MEMS, radio frequency MEMS (RF-MEMS), chemical-MEMS (C-MEMS), bio-MEMS (B-MEMS), and monolithic microwave integrated circuitry (MMIC). Development of basic aspects of design, fabrication, and integration in the context of modern system-on-chip (SOC) technology. Introductory expertise in nanosystems to develop basic nanosytems designs via finite element analysis (FEA) modeling.

NNSE 531 Vacuum science and Fundamental of Vapor-based processing (3)

Fundamentals of vacuum science and technology: vacuum pumps and gauges, leak detection. High vacuum system design. Fundamentals of chemical vapor deposition (CVD), Metal-organic CVD and atomic layer deposition, dry etching process, physical processes at vapor-solid interfaces, design of vapor-based processing and applications.

NNSE 532 Diffraction/spectroscopy/microscopy (3)

Fundamental principles and experimental implementation of x-ray/electron diffraction, Auger Electron Spectroscopy, X-Ray Photoelectron Spectroscopy, Secondary Ion Mass Spectrometry, Energy-dispersive X-ray Spectroscopy, Scanning Electron Microscopy, Atomic Force Microscopy, Ultrasonic Force Microscopy, and Transmission Electron Microscopy. Experimental techniques, sample preparation, contrast mechanisms, areas of application.

NNSE 541 Introduction to NanoElectronics (3)

Topics include an introduction to the operating principles of nanoscale electronic and optical devices (quantum devices). The emphasis will be on how nano-fabrication technology and quantum mechanics affect the properties of reduced sizes and dimensions. Specific examples of devices based on quantum wells, wires and dots are given.

NNSE 555 Principles of Technical Project Management (3)

Planning, budgeting, identification of risks and risk mitigation approaches, resource allocation, review of milestones and schedules, evaluating projects to measure success. Responsibilities of managers for problem solving, motivating and managing creative technical staff in project and matrix organizations. Prerequisite: Consent of Instructor.

NNSE 560 Materials Processing Economics (3)

Comparison and projection of yield, manufacturing output, labor and equipment expenses to calculate and estimate costs relative to performance enhancements for materials processing by alternate approaches. Identification of equipment, facilities and overheads based on specific manufacturing methods. Tools to estimate the economics of process. Address the effect of overall system costs and its benefits. Prerequisite: Consent of Instructor.

NNSE 563 Academia, Business, and Government: Opportunities and Challenges in Science and Technology Partnerships (3)

Science and technology advancements are powerful transformers of society. Government influences the outcomes of science, and in turn, science influences the actions of government, business and academic. Weekly seminar classes will help prepare graduate students to understand and learn the dynamics of developing and managing science and technology policies from individual and combined business, government, and academia perspectives which will help students examine and discuss practical applications, including public-private collaborative efforts in funding research, development, and technology deployment.

NNSE 564 Finance and Valuation of Nanotechnology Based Firms (3)

This course will cover elements of entrepreneurial finance, focusing on nanotechnology based start-up ventures. The first part of the course will cover models that can be used for valuing nanotechnology based firms. The second part will address key questions which entrepreneurs in nanotechnology based industries face: how much money can and should be raised, when should it be raised and from whom, and how funding should be structured. The subject aims to prepare students for these decisions as entrepreneurs in nanotechnology related industries. Prerequisites: Open to graduate students in the CNSE or Departments of Economics, School of Business, with permission of instructor.

NNSE 565 Managing the Adoption of Technological Innovation (3)

A review of alternative models for commercializing technology such as limited exclusive teaming, strategic alliances, and arms length product development within the context of nanoscience-based technologies and the distributed economy. Main issues driving the creation and operation of strategic alliances will be identified as the foundation for understanding the commercialization process for nanoscience-based technologies.

NNSE 570 Nanochip Manufacturing Technology (3)

Introduces the basic principles of integrated circuit “nanochip” operation and presents, in detail, the fundamentals of nanochip fabrication including a description of typical obstacles encountered. Critical aspects are discussed with respect to current nanochip designs to achieve maximum speed and future changes to improve this response with low power loss. The course will also describe structural and functional differences between Logic, Dram, Flash etc types of devices. Working principles of standard fabrication techniques in the semiconductor industry will be overviewed as well as detailed yield-control strategies necessary to keep an IC ‘Fab’ plant profitable. Prerequisites: Open to undergraduate seniors and graduate students in the CNSE or Departments of Physics, Chemistry, Computer Science, or Biology with permission of instructor.

NNSE 571 Principles of Reliability for Semiconductor and Nanoscale Applications (3)

Ensuring reliability is commonly one of the most important and time consuming (expensive) efforts accompanying process and product development, yet the degradation processes in small (e.g. nanoscale) devices often challenge our understanding of materials science and the physical principles of failure. This course will introduce the student to the fundamentals of reliability theory and the science of materials degradation as related to semiconductor, MEMS and NEMS devices leading to an appreciation and an understanding of how materials fail. Basic statistics and thermodynamics as applied to reliability will be discussed. Upon completion of this, detailed descriptions of the known failure mechanisms will be described as well as accelerated reliability testing and data manipulation to extract failure rates and to design qualification testing programs to ensure reliability. Prerequisite: Permission of instructor.

NNSE 601 Chemical Vapor Deposition of Nanostructured Materials (3)

Fundamentals of thin film and nanostructured materials. Kinetics, heterogeneous reactions, reaction pathways, nucleation. Plasma-enhanced techniques, plasma promoted nucleation. Atomic layer deposition fundamentals. Half-reactions, adsorption kinetics, by-product volatilization. Prerequisite: Permission of Instructor.

NNSE 602 Atomic Layer Film Growth (3)

Introduction to thin film processing techniques and associated applications. Thermodynamics and kinetics of heterogeneous reactions. Theory of atomic layer deposition (ALD) half-reactions. Specific ALD applications. Processing considerations for ALD processing. ALD processing equipment and characterization techniques.

NNSE 603 Nanomaterials Processing (3)

This course is intended for second or third year graduate students with a research focus or interest in the processing of nanoscale materials. This course will cover practical aspects of the scientific principles guiding the growth of both organic and inorganic nanomaterials by both vapor phase and solution phase processing. These materials include carbon nanostructures (nanotubes, nanospheres, graphene sheets, etc.), biological systems (polypeptides, proteins, DNA), and metallic nanostructures (Si nanowires, metal whiskers, etc.). Emphasis will be placed on developing an understanding of the basic growth mechanisms and characteristics of each class of material and growth technique. Prerequisite: Approval of instructor.

NNSE 604 Plasma Processing of Nanoscale Materials (3)

Fundamental physical aspects of plasmas for processing nanoscale materials. The chemistry of plasmas. Hardware considerations in plasma processing. Specific plasma processing applications: Surface preparation and cleaning, reactive ion etching, sputtering, PECVD, and PEALD. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 605 Integrated Circuit Manufacturing I (3)

Covers basic tools and principles of chip construction. Describes structural and electrical differences between logic, dram, flash, etc. tipes of devices. Covers in detail how a chip is constructed and some of the problem areas encountered. Fundamental modules of ion implantation, pecvd, Lpcvd, Rie behavior, control of profiles, diffusion, Lithography, yield control tactics, deposition, oxidation kinetics, as well as future changes in the technology over the next 10 years will be covered. Future changes will be understood in terms of factors that drive speed of Microprocessors.

NNSE 606 Integrated Circuit Manufacturing II (3)

Covers in more detail areas of diffusion, ion implantation and oxidation, test methods and yield strategies.. Updates major topics from Term 1 in such areas as low k problems, new gate materials, new gate oxide materials, new inspection methodologies and test methods. Updates covered using in class slides as well as assignment of new papers in relevant areas and class discussions of same. Students on completion will be up to date in all new developments and techniques to work in the Integrated Circuit Industry. Prerequisite: NNSE 605.

NNSE 607 FabLab (3)

Real world teaming-based laboratory course. Students form teams to design, build, and test an actual device that operates based on the physical principles of nanotechnology in the CNSE/ANT facilities. Students will have at least one Industry/Research partner and one CNSE faculty as instructors. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 610 Elasticity, Plasticity and Fracture (3)

Fundamentals of theoretical fracture strength, deformation mechanisms of solids associated with dislocations, stacking faults, creep, fatigue, twinning and other forms of material adjustment to stress including point defect motion, theory of dislocations and interactions at grain boundaries and with solute atoms such as occurs in precipitation hardening.

NNSE 611 Introduction to Optics for Nanolithography (3)

Founding optical principles for optical nanolithography. Introduction to Fourier Optics, Statistical Optics, Aberration Theory pertaining to advanced nanolithographic systems. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 612 Optical Processes in Nanoscale Solids (3)

This course provides a theoretical overview of the optical properties of solids and the experimental methods used to characterize them including ellipsometry, photoreflectance and second harmonic generation. The course will primarily focus on semiconductor and metal single crystal solids. Building upon the optical properties of these bulk materials, this course describes research into the changes in bulk materials optical properties due to nanoscale phenomena such as quantum confinement. The theory behind photoreflectance and second harmonic generation will also be presented, in addition to the use of photoreflectance to measure stress induced changes in the critical point of silicon. Prerequisites: Foundation modules including, Solid State Quantum 1A and 1B, Nanoscale Electronic and Magnetic Properties, and Optical/Photonic properties of Nanostructures and NNSE 512 Quantum Theory of Solids II, or permission of the instructor.

NNSE 613 Practical Optoelectronics: Design, Fabrication, and System Integration (3)

Topics include design and fabrication of nanoscale optoelectronic components, monolithic and hybrid integration between photonics and electronic components and associated challenges. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 614 Materials for Alternate Energy and Environmental Applications (3)

Processing of thick and thin film materials for device applications in energy and environmental uses. Evaluation of properties and performance of practical power systems that benefit from optimization of materials processing approaches. Device applications considered are sensors, power semiconductor chips, fuel cells, superconductors, solar cells, energy storage and other alternative power sources.

NNSE 615 Semiconductor Optoelectronic Devices and Nanophotonics (3)

Introduction to semiconductor optoelectronic devices for communications and other applications, covering design, operating principles and practical device features. Review of relevant semiconductor physics. Optical processes of semiconductors, waveguides, and microcavities. Introduction to photonic crystals and photonic bandgap materials.

NNSE 616 Nanoelectronic Semiconductor Devices (3)

This course focuses on the solid-state quantum properties and nanoscale technology of various semiconductor-based electronic and optical devices. This course will make special emphasis on the properties of various types of junctions (p-n junctions, heterojunctions, metal-semiconductor junctions) leading to various electronic devices such as field effect transistors (FETs), metal-oxide-semiconductor FETS (MOSFETs), high electron mobility transistors (HEMTs), etc. In addition, a large portion of the class is devoted to the study of fundamentals of semiconductor-based photodetectors, various types of detection schemes (Schottky, MSM), and Solar Cell technology. The importance of miniaturization and heterostructures in modern high-speed quantum-effect devices will be emphasized throughout. Prerequisite: NNSE 509.

NNSE 617 Principles of Low-Dimensional Nanoelectronics (3)

The objective of this course is to provide students with advanced principles and knowledge of emerging 1-D and 2-D nanoelectronic devices. The first part introduces fundamental principles of nanoscale engineering and key properties of 1D/2D nanostructures. The second part focuses on specific device concepts, device physics, and potential applications in nano-based information processing (computing) and information storage (memory). Particular attention will be paid to low-dimensional nanostructures in implementing future-generation nanoelectronic systems engineered at nanoscale physical dimensions. Prerequisites: NNSE 509 Nanoscale Device Principles, NNSE 616 or permission of the instructor.

NNSE 620 Quantum Electronics and Nonlinear Optics (3)

Quantum mechanical description of spontaneous and simulated emission, absorption and amplification, optical cavities, lasers, Q-switching, mode locking. nonlinear properties. microcavities, semiconductor lasers, quantum-cascade lasers, coherent terahertz spectroscopy, ultrafast and nonlinear optical devices.

NNSE 621 Quantum Transport (3)

This course will cover fundamentals of carrier transport in reduced dimensional semiconductors. The course is intended for graduate students interested in understanding a bottom-up approach to current flow, beyond the classical approach based on drift-diffusion and Boltzmann transport equations. We will review the electronic properties of materials that are being actively investigated and examine the unique transport properties that arise in these materials. Current flow based on Landauer equations to more advanced Non Equilibrium Green’s Function formalisms will be covered, and their relation to T-Matrices will be discussed. The lectures will be supplemented with Matlab examples. Prerequisites: NNSE 507: Quantum 1A,B; NNSE 512, or permission of instructor.

NNSE 625 Quantum Processes in Solids and Nanostructures (3)

This course addresses the fundamental properties of nanomaterials and nanodevices by applying the methods of quantum mechanics and statistical mechanics to examine the atomic and electronic properties of solid state and nanostructured materials. Topics covered include fundamentals of thermodynamics and statistical mechanics, the atomistic origin of materials behavior based on the single particle picture of molecules and solids, and the physical properties of surfaces, interfaces and nanostructures. Prerequisites: Completion of NNSE 511 and 512 or equivalent.

NNSE 626 Quantum Processes in Solids and Nanostructures II (3)

This is the second half of a one-year course that addresses the fundamental concepts relevant to the investigation of nanomaterials and nanodevices by applying the methods of quantum mechanics and nanoscale statistical mechanics to examine the atomic and electronic properties of surfaces and nanostructured materials and devices. Topics covered include atomic and electronic structure of clean and adsorbed surfaces, scanning tunneling microscopy, surface kinetics and dynamics, scattering view of nanoscale quantum transport, single-electron tunneling, and molecular-scale electronics.

NNSE 631 The Science and Technology of MEMS and NEMS (3)

Design and fabrication of Micro- and Nano-Electro-Mechanical systems (MEMS/NEMS) including a comprehensive introduction to architecture design, process flow, fabrication, packaging and testing. Topics covered will include optical, fluidic and electromechanical aspects of MEMS/NEMS.

NNSE 635 Metrology for MEMS and NEMS (3)

Introduction to existing and next-generation metrology tools for MEMS and NEMS inspection and qualification. Theoretical principles of metrology and experimental work on characterization of prototype MEMS and NEMS devices in conjunction with complementary course offerings in the general metrology curriculum and participation in ongoing projects with corporate sponsors. Prerequisites: NNSE 532.

NNSE 636 Bio-MEMS and Bio-NEMS (3)

Cross-disciplinary application of MEMS and NEMS to the biological sciences. Topics include the interaction of living cells/tissues with nanofabricated structures, microfluidics for the movement and control of solutions, and the development of I/O architectures for efficient readout of bio-reactions.

NNSE 640 NanoTechnology and Photovoltaics (3)

Topics focus on the application of nanoengineered materials and structures to photovoltaic technologies and include impact on performance and operation.

NNSE 641 Principles of Sensors: Chemical, Biological and Physical (3)

Fundamentals of sensor design, transduction techniques, and tailored coatings for chemical, biological and physical sensing applications, sensitivity and selectivity concerns, array design and pattern recognition algorithms.

NNSE 642 Advanced Fuel Cells (3)

Topics focus on application of nanomaterials integration in and nanoengineering of emerging fuel cell geometries and concepts. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 643 Power Electronics (3)

Topics focus on emerging concepts in device design and nanomaterials integration in power electronic system architectures. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 644 Nanoelectrochemical Systems (3)

This course will explore the theory and application of electrochemical processes as they apply to integrated nanoelectrochemical systems for use in sustainable ecosystems, including fuel cells, electrolyzers, supercapacitors, batteries, and photochemical solar cells. As an introduction, a thorough review of classical electrochemical principles, concepts and characterization methods will be given, including the nature and structure of the double layer, as well as the kinetics of electrode reactions. This will be followed by a discussion of and extension of these principles to the nanoscale. The discussion will focus on this area of active research, will involve an examination of recent literature in the field, including recent progress in electrocatalysis with nanoparticles supported on a variety of materials. Specific attention will be given to nanostructured thin film electrodes and electrolytes which are applicable to integrated nanoelectrochemical systems. The course will include the introduction to and hands on use of an electrochemical scanning microscope. Prerequisites: [It is recommended that students have taken the equivalent of 502 (Mathematical Methods for Non-Biological Nanosciences) and the Foundations (506) courses] and permision of instructor.

NNSE 645 Nanoparticles, Nanostructured Materials, and Nanodevices (3)

Design principles and implementation of nanoengineered materials in the development of nanotechnological applications. Novel structural functionality, sensory functionality, and information processing capabilities of nanomaterials. Integration and fabrication paradigms of such functional materials in nanotechnology.

NNSE 646 Electrochemical Methods (3)

This course is a companion course to CNSE 644 and will explore both the theory and application of electrochemical methods to nanoelectrochemical systems. As an introduction, a thorough review of classical electrochemical principles will be given, including the nature and structure of the double layer, as well as the theory of charge transfer and the kinetics of electrode reactions. This will be followed by a discussion of basic methods of modeling nanoelectrochemical systems. This will be followed by an in-depth discussion of current applications of potential sweep methods of analysis, polargraphic and pulse voltammetry, controlled current techniques, hydrodynamic methods involving forced convection, as well as techniques based upon concepts of impedance and scanning probe techniques. The discussion will include a focus on areas of active research and will involve an examination of recent literature in the field. The course will include individual class projects with hands on use of the rotating ring disk electrode and the scanning electrochemical microscope. Prerequisites: NNSE 644 and permission of instructor.

NNSE 650 Thermodynamics and Statistical Mechanics of Small Systems (3)

This course will focus on physical phenomena unique to small systems (e.g. nano-crystalls, macro-molecules) using the framework of non-equilibrium statistical mechanics (classical and quantum) as well as classical thermodynamics extended to include surface effects etc. An important distinction between standard thermodynamics and the thermodynamics of small systems is the absence of the "thermodynamic limit" in the later. Thus small systems are inherently non-extensive (doubling the volume doesn't necessarily lead to a doubling of the entropy, etc.). Specialized topics (e.g. mesoscopic transport) will be touched on in order to illustrate and extend the general principles. As this is a rapidly emerging field, reading of primary-source literature will be emphasized. Important concepts will be illustrated through the use of numerical simulations in FEMLAB (access will be provided). Prerequisite: At least one year of undergraduate level quantum mechanics; Thermodynamics and Statistical Mechanics; Calculus up to an including differential equations; familiarity with at least one programming language desirable but not necessary.

NNSE 651 Fundamentals of Nanolithography I (3)

Fundamental concepts and practices in nanolithographic processing. Topics include resist fundamentals, track systems, and scanner technology — based on classic text by Levinson. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 652 Fundamentals of Nanolithography II (3)

Design data creation and manipulation. Mask making. Metrology and inspection for lithography. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 653 Advanced Optics for Nanolithography (3)

Advanced optical concepts for optical nanolithography applications including: Fourier Optics, Statistical Optics, Aberration Theory. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 654 Charged Particle Optics (3)

Fundamentals of charged particle optics including conventional and immersion lens approaches to focusing. Aberration theory and source technology. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 655 Resist Chemistry and Processing for Nanolithography (3)

Fundamentals of advanced resist chemistries and processing for nanolithography. Includes survey of negative and positive resists and application of chemically amplified resists. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 656 Alternative and Experimental Nanolithographies (3)

Survey of alternative projection lithography, soft lithography, and direct write lithography for nanoscale patterning. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 657 Bioconjugation Techniques and Purification Strategies for Nanobiology (3)

This course will give a detailed overview of reactive groups in biochemical systems and introduce an assortment of conjugation chemistries for biomolecular crosslinking and surface modification for both macro- and nano-biological applications. Likewise, general approaches for separation and analysis of biomolecules and conjugation agents will be discussed. The course will initially focus on the chemical properties of biomolecular functional groups and their reactions in polar environments (with a focus on aqueous systems). Single/multifunctional, cleavable, photo-activated cross-linkers and reagents will be discussed, including self-assembled monolayer chemistry and similar modification strategies for various nanostructured metallic and semiconductor interfaces. Analytical methods and purification strategies such as dialysis, filtration, and liquid chromatography etc will be covered. Prerequisite: Permission of Instructor. Recommended prerequisite courses: NNSE 504, NNSE 506 and NNSE 508. Undergraduate coursework in Biochemistry (protein structure/function) and Organic & Inorganic Chemistry.

NNSE 658 Biomedical Nanotechnology (3)

This course will introduce in-depth knowledge of biomedical nanotechnology and nanomedicine. Emphasis will be on the applications of nanotechnology in stem cell research, tissue engineering, drug delivery, gene therapy, cancer therapy, diagnostics, imaging, and nanotoxicity. Students with satisfactory completion of the course will have a demonstrated knowledge of how to apply nanotechnology to address biological and biomedical problems. Prerequisites: NNSE 506 Principles of Nanobiology/NNSE 508 Interfacial Properties of Nanobio Systems and permission of instructor.

NNSE 660 Semiconductor Metrology and Defect Analysis (3)

A detailed overview of current characterization methods critical to transistor fabrication, on-chip interconnection, lithography, defect detection and characterization, and process yield analysis. This course would cover the myriad techniques in use in or near semiconductor fabrication facilities that are critical to achieving acceptable process yields. Emphasis would be placed on how to determine whether fabrication processes are correctly working and when they are not and how to do root cause analysis. Therefore the course would include descriptions of key fabrication processes encountered in real fabrication facilities. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 661 Semiconductor Metrology (3)

A detailed overview of current characterization methods critical to transistor fabrication, on-chip interconnection, lithography, defect detection and characterization, and process yield analysis. This course would cover the myriad techniques in use in or near semiconductor fabrication facilities that are critical to achieving acceptable process yields. Prerequisite: Permission of Instructor.

NNSE 662 Defect Review and Analysis (3)

This course would look at how metrology tools of the type described in SNN 661 would be actually used to solve real world manufacturing problems. Emphasis would be placed on how to determine whether fabrication processes are correctly working and when they are not how to do root cause analysis. Therefore the course would include descriptions of key fabrication processes encountered in real fabrication facilities.

NNSE 665A Electron Beam Analysis of Nanostructures (3)

First Part of a two-semester course on the application of electron beam techniques to the extraction of morphological, chemical and crystallographic information about nanomaterials. This course will provide a detailed understanding of the scanning electron microscope including electron probe formation, electron solid interactions, and the measurement and analysis of a variety of emitted signals including secondary and backscattered electrons, x-rays and cathodoluminescent.

NNSE 665B Electron Beam Analysis of Nanostructures (3)

Second of a two-semester course on the application of electron beam techniques to the extraction of morphological, chemical and crystallographic information about nanomaterials. The second semester would look at transmission electron microscopy, auger spectroscopy, and atomic force microscopy including atomic resolution imaging and high spatial resolution chemical imaging by Auger and other techniques. It would also cover special specimen preparation techniques like tripod polishing, conventional ion milling, and focused ion beam techniques. Prerequisite course: NNSE 665A.

NNSE 667 Surface Analysis of Nanostructures (3)

This course will look at a variety of currently used surface analytical techniques for the examination of nanomaterials and nanomaterial systems including Rutherford backscattering, nuclear reaction analysis, secondary ion microanalysis, proton excited x-ray analysis, atomic force microscopy, ultrasonic force microscopy, low energy electron diffraction, and x-ray photoelectron spectroscopy and compare them with regard to sensitivity, spatial and depth resolution, sample requirements and the kinds of information they can provide in the examination of nanostructures and materials. Prerequisite: NNSE 505.

NNSE 668 Photonic Characterization of Nanomaterials (3)

This course will look at a variety of optical techniques critical to the characterization of nanomaterials including optical microscopy, confocal microscopy, infrared and Raman microscopy and x-ray techniques including x-ray reflectrometry, total reflection x-ray spectroscopy, and x-ray microbeam techniques including the use of synchrotron radiation to do extended x-ray absorption fine structure and x-ray microscopy.

NNSE 670 Transmission Electron Microscopy (4)

Basics of nanoscale analysis using specialized transmission electron microscope instumentation such as scanning TEM, HRTEM, cryo-TEM and TEM-STM. Course emphasizes practical training in the operation of advanced TEM instrumentation, stressing hands-on laboratory sessions and a semester-long project involving a specimen of the student's choosing ( a task related to the student's research program in nanotechnology is strongly encouraged). Suitable project topics include: specialized sample preparation for nanostructures (FIB & tripod polishing); amorphous & nanocrystalline materials; imaging and spectroscopy of quantum wells and quantum dots; interface nanostructure and segregation. Prerequisites: NNSE 505 and consenct of instructor.

NNSE 671 Advanced Methods for Structure Determination (4)

Advanced transmission electron microscopy techniques: high-resolution lattice imaging and image simulation for analysis of structural defects and interfaces, z-contrast. Convergent beam electron diffraction as method of nano-scale structural characterization of materials. High-resolution X-ray diffraction technique, application to studies of quantum dots and quantum well structures. Labs -2 hours/2weeks per group, alternating weeks for different groups (max number of students in an individual group not to exceed 5). Prerequisite: NNSE 670.

NNSE 672 Advanced Methods for Structure Determination (4)

Geometry of interfaces, atomic arrangement, energy of interfaces. Diffusion and segregation at the interfaces. Advanced methods: electron energy loss spectroscopy, electron energy filtered imaging and TEM z-contrast for interfacial studies. Prerequisite: NNSE 670.

NNSE 673 X-ray Scattering and Crystallography for Nanoscale Materials and Structures (3)

Application of advanced x-ray scattering and diffraction techniques for the investigation of nanomaterials, nanodevice structures, and nanoscale modulated systems. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 674 Focused Ion Beam Technology (3)

In-depth review of current focused ion beam technologies as developed for 3D tomographic imaging, defect review, circuit repair, and TEM sample preparation. Prerequisites: Foundations sequence, permission of instructor. Offered annually.

NNSE 675 Molecular Self-Assembly (3)

Advanced theoretical and experimental principles of self-assembled molecular layer deposition techniques. Experimental processing techniques and analytical models of molecular film growth. Prerequisite: Consent of Instructor.

NNSE 677 Vapor Phase Growth of Self-Assembled Structures (3)

Vapor phase approaches for the growth of self-assembled nanostructures including quantum-dot structures in semiconductors and semiconductor-based nanotubes. Experimental and theoretical review of growth modes and processing control of directed assembly. Prerequisite: NNSE 675.

NNSE 679 Nanoparticles and Nanoparticle Interactions in Environmental Sensing (3)

Techniques for the synthesis, processing, deposition and analysis of nanoparticles and nanocomposites. Chemical sensor design and sensing principles of nanoparticles and nanocomposites for environmental applications.

NNSE 680 Seminar in Nanosciences and Nanoengineering (1-6)

Advanced individual theoretical and experimental work, conferences, and reports. May be taken in either semester or both.

NNSE 681 Seminar in Nanobiology (1)

This course introduces students to current topics in nanobiology through both reading and discussion of current scientific literature. Critical reading of scientific papers in the field of nanobiology will serve as the basis for weekly discussions. Students will participate in choosing current, high-quality research articles for discussion and will be expected to present at least one article during the course of the semester. In addition to exploring the field of nanobiology, this course is intended to familiarize students with scientific literature. Students will learn to use online databases and search engines to find articles and will learn how to critically review both the written articles and the experimental research procedures. Students will be evaluated based upon participation in discussion sessions, as well as through one in-class oral presentation. Prerequisites: Open to students with permission of instructor; also open to superior undergraduate seniors with the approval of their advisers and the written consent of their department chairs.

NNSE 682 Seminar in Nanoeconomics (1)

This course introduces students to current topics in nanoeconomics through both reading and discussion of current scientific, economic and management literature. Critical reading of papers in the field of nanoeconomics will serve as the basis for weekly discussions. Students will participate in choosing current, high-quality research articles for discussion and will be expected to present multiple articles during the course of the semester. In addition to exploring the field of nanoeconomics, this course is intended to familiarize students with relevant literature. Students will learn to use online databases and search engines to find articles and will learn how to critically review both the written articles and the research methodologies. Students will be evaluated based upon participation in discussion sessions, as well as through in-class oral presentations. Prerequisites: Open to students with permission of instructor; also open to superior undergraduate seniors with the approval of their advisers and the written consent of their department chairs.

NNSE 683 Seminar in Nanoscale Engineering (1)

This course introduces students to current topics in nanoengineering through both reading and discussion of current scientific literature. Critical reading of scientific papers in the field of nanoengineering will serve as the basis for weekly discussions. Students will participate in choosing current, high-quality research articles for discussion and will be expected to present at least one article during the course of the semester. In addition to exploring the field of nanoengineering, this course is intended to familiarize students with scientific literature. Students will learn to use online databases and search engines to find articles and will learn how to critically review both the written articles and the experimental research procedures. Students will be evaluated based upon participation in discussion sessions, as well as through one in-class oral presentation. Prerequisites: Open to students with permission of instructor; also open to superior undergraduate seniors with the approval of their advisers and the written consent of their department chairs.

NNSE 689 (Sph 697) Nano and Public Health Internship (3-6)

The internship program at either institution will offer concentrations in the areas of: epidemiology, environmental health, biomedical sciences, health policy, nanoscience, nanoengineering, nanobioscience, or nanoeconomics. These internships will be in support of research for the NanoLife initiatives which focuses on environmental and human health and safety of engineered nanomaterials. Internship rotations may be full-time or part-time. Each credit represents a minimum of 80 hours of work with a host agency or organization. A paper and an oral presentation are required. Prerequisite: Admission to the MPH program or CNSE graduate program.

NNSE 695 Introduction to Research Problems in Nanosciences and Nanoengineering (3)

Individually directed research studies into areas of current research interest in nanosciences and nanoengineering. Prerequisite: Consent of faculty instructor.

NNSE 696 Introduction to Research Problems II (3)

Individually directed research studies in areas of current research interest in nanoscale science and nanoscale engineering to be taken in second semester of graduate study at CNSE. Will conclude with delivery of research results at the end of the semester. Prerequisite: Completion of NNSE 695 and consent of research advisor.

NNSE 697 Master’s Research in Nanoscale Science (1-9)

Individually directed research studies in Nanoscale Science for Master’s degree students. Prerequisite: Permission of instructor.

NNSE 698 Master’s Research in Nanoscale Engineering (1-9)

Individually directed research studies in Nanoscale Engineering for Master’s degree students. Prerequisite: Permission of instructor.

NNSE 699 Masters Thesis in Nanosciences and Nanoengineering (2-6)

NNSE 731 Current Topics in Molecular Materials and Architectures (3)

Individually directed research studies into areas of current research interest in molecular materials and architectures. Pre-requisite: Permission of instructor.

NNSE 737 Current Topics in Optoelectronic Materials, Architectures, and Devices (3)

Individually directed research studies into areas of current research interest in optoelectronic materials, architectures, and devices. Pre-requisite: Permission of instructor.

NNSE 742 Current Topics in Nanosystems Sciences and Technologies (3)

Individually directed research studies into areas of current research interest in nanosystems sciences and technologies. Pre-requisite: Permission of instructor.

NNSE 750 Thin Film Single and Multilayered Material Structures (3)

Individually directed research studies into areas of current research interest in thin film single and multilayered material structures. Pre-requisite: consent of a faculty member who will act as supervisor of the investigative studies.

NNSE 756 Nanomaterials for Nanotechnology (3)

Individually directed research studies into areas of current research interest in nanomaterials for nanotechnology. Pre-requisite: Permission of instructor.

NNSE 762 Nanomaterials for Nanoscale Materials Modeling, Characterization, and Metrology (3)

Individually directed research studies into areas of current research interest in nanomaterials for nanoscale materials modeling, characterization, and metrology. Pre-requisite: Permission of instructor.

NNSE 780 Current Topics in Nanosciences and Nanoengineering (1-3)

Selected topics of current interest in nanosciences and nanoengineering such as molecular self-assembly phenomena, emerging hybrid material and system integration protocols, and advanced topics in molecular materials and architectures; optoelectronic materials, architectures, and devices; nanosystems sciences and technologies; thin film single and multilayered material structures; nanomaterials for nanotechnology; and nanoscale materials characterization, modeling, analysis, and metrology.

NNSE 784 Special Topics in Nanosciences and Nanoengineering (1-6)

Selected coverage of specialized topics in non-traditional areas where nanosciences and nanoengineering play an important role, such as design, growth, and properties of nanomaterials, including metals, semiconductors, polymers, and chemical and biological materials; integration, processing, testing and qualification of these materials in integrated nanocircuitry, micro- and nano-systems and sensors, and integrated optics; nanoelectronics; bioelectronics; telecommunications; wireless communications; optical devices and components; leading edge metrology; and sensor-on-a-chip devices for energy, environment, and defense applications. Often staffed by guest lecturers and speakers.

NNSE 810 Research in Nanosciences and Nanoengineering (1-15)

Research in nanosciences and nanoengineering for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 812 Research in Thin Film Single and Multilayered Material Structures (3-15)

Research in Thin Film Single and Multilayered Material Structures for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 812 Research in Thin Film Single and Multilayered Material Structures (3-15)

NNSE 814 Research in Optoelectronic Material, Architectures, and Devices (3-15)

Research in Optoelectronic Material, Architectures, and Devices for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 816 Research in NanoSystems Sciences and Technologies (3-15)

Research in NanoSystems Sciences and Technologies for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 818 Research in Nanomaterials for NanoTechnology (3-15)

Research in Nanomaterials for NanoTechnology for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 820 Research in Nanomaterials Modeling, Characterization, Analysis, and Metrology (3-15)

Research in Nanomaterials Modeling, Characterization, Analysis, and Metrology for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 822 Research in Molecular Materials and Architectures (3-15)

Research in Molecular Materials and Architectures for students working beyond the Masters degree level. Consent of the Dean of the school or the doctoral student's advisory committee required. Residence credit earned in this course becomes applicable upon satisfactory completion of all other requirements established for the Ph.D. degree in nanosciences and nanoengineering.

NNSE 899 Doctoral Dissertation in Nanosciences and Nanoengineering (1)

Required of all candidates completing the degree of Doctor of Philosophy.

Last updated on 3/31/2010